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Test Methods for the Performance and Evaluation of Metal Face Seals for Use in Fluid Delivery Systems – SEMI

SEMI – August, 2002 Test Methods for the Performance and Evaluation of Metal Face Seals for Use in Fluid Delivery Systems This test method was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on August […]

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MDS – Material Performance, September 1999

The standard metal face seal fitting is used throughout the semiconductor industry on process lines that span the range from high pressure to high vacuum. Leakage of fluids out of a system may be catastrophic in those containing toxic, corrosive, or pyrophoric materials. Leakage of moisture and particles into a system has a negative impact […]

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