MDS – Material Performance, September 1999
The standard metal face seal fitting is used throughout the semiconductor industry on process lines that span the range from high pressure to high vacuum. Leakage of fluids out of a system may be catastrophic in those containing toxic, corrosive, or pyrophoric materials.
Leakage of moisture and particles into a system has a negative impact on product yields and life expectancy of a gas system because of internal corrosion. This article addresses leakage both into and out of a gas system from fittings under normal and more challenging applications. Torque elimination enhances the reliable functioning of metal face seal fittings that are exposed to shock/vibration.